Honeywell: New 13mm 13V Pressure Sensor - Built for Ultra High Purity Applications
Our partner Honeywell is excited to announce the release of its 13mm pressure sensor, the latest in the 13V series, specifically designed for High Purity (HP) and Ultra High Purity (UHP) applications that involve measurement of gases and liquid flow in harsh environments.
The new 13mm 13V pressure sensor is designed with a SEMI F20 compatible ring and diaphragm for such applications. It is a rugged, media isolated, high performance package pressure sensor that uses the Honeywell proven piezoresistive semiconductor sensor chip in an oil-isolated housing. The sensor exhibits exceptional corrosion resistance and is specifically designed to withstand the aggressive nature of halogenated gases commonly encountered in semiconductor manufacturing processes.
The new 13mm 13V pressure sensor is designed with a SEMI F20 compatible ring and diaphragm for such applications. It is a rugged, media isolated, high performance package pressure sensor that uses the Honeywell proven piezoresistive semiconductor sensor chip in an oil-isolated housing. The sensor exhibits exceptional corrosion resistance and is specifically designed to withstand the aggressive nature of halogenated gases commonly encountered in semiconductor manufacturing processes.
| Feature | Benefit |
| SEMI F20 compatible Wettable media | Product can be used in Ultra High Purity (UHP) applications |
| Surface roughness < 0.127 μm | No impurities introduced by the sensor interface |
| Excellent offset drift under prolonged vacuum condition and product tilt | Less frequent calibration/ down time, more run time |
| Media compatible with commonly used gases in semiconductor processing | Reduced number of part numbers to maintain |
| High volume manufacturing setup | Reliable and consistent delivery with short LT |
Applications
- Semiconductor equipment
- Integrated Gas Systems (IGS)
- Process control gas
- Mass flow controller
- Liquid flow monitoring
- Solar panels
- Displays/Instrumentation
- Medical equipment
SEMI F20 compatible: SEMI F20 compliant sensors can simplify regulatory compliance since they are designed to meet recognized industry standards. This compliance not only aids in fulfilling quality assurance requirements but also positions favorably in audits and inspections related to manufacturing practices
For more detailed product specifications, please check the attached data sheets. If you are interested in samples or have other questions, please conact your SE Spezial Sales Representative or send a mail to vertrieb@spezial.com.